ANALYTICAL wafer
probers

Wafer Probe Systems for your application:

customized, enhanced, standard

 

Wentworth’s flagship analytical wafer probing platform, the Pegasus™ FA Series semi-automatic probers, bring speed, versatility, accuracy and dependability to a variety of wafer and package testing applications. Pegasus™ FA wafer probers utilize proprietary LabMaster™ control software, an intuitive graphics user interface for real-time monitoring of the probing set up and control of the prober’s accessories, as well as premium mapping capability and real-time yield analysis of the wafer and lot under test. When equipped with Pegasus™ submicron automated manipulators, Pegasus™ probers deliver ‘hands free’ debugging of devices on wafers up to 300mm. The Pegasus™ Series wafer probers deliver a host of other advanced accessories, including hot chucks, optics, lasers, and many others, offering customers a full turnkey solution.

Pegasus™ FA Series

Probe Stations for 200mm and 300mm Wafer Probing

 

Pegasus™ S200FA and S300FA

Wentworth Pegasus™ FA Series Wafer Probers set the highest standard for versatility and ease of operation. An ideal platform for many applications, Pegasus™ S200FA and Pegasus™ S300FA semi-automatic wafer probe stations utilize a wide selection of productivity-enhancing accessories and accommodate upgrades to meet future probing requirements.

Versatile

  • Pegasus™ S200FA supports full and partial wafers to 200mm
  • Pegasus™ S300FA supports full and partial wafers to 300mm
  • Temperature ranges from -60C to 300C
  • Support a wide range of cantilever probe cards
  • Motorized and manually driven manipulators
  • Programmable and manual microscope mounts
  • Lasers for cutting & marking
  • Temperature chuck plus a wide range of other accessories

Easy to Use

  • Pegasus™ console with joystick and LCD monitor display features simple menus enabling the user to operate the prober with ease
  • Optional LabMaster™ software enables the part time-to-advanced user to design sophisticated test routines
  • LabMaster™ seamlessly integrates with leading testers while simultaneously communicating with all probe system accessories

Positioning Accuracy

  • Precision ball-screws & stepper motors deliver repeatable accuracy over a wide temperature range due to Wentworth's exclusive calibration process

Custom Solutions

  • Hardware and software solutions can be customized to your wafer prober / tester requirements

M200FA

Manual Analytical wafer Prober for Wafers up to 200mm

 

Failure Analysis / Characterization / Design Verification

Wentworth M200FA manual analytical wafer prober for up to 200mm (8-inch) wafers delivers a cost-effective probe station for failure analysis, device characterization and inline process verification. Its compact design and extensive feature set are ideally suited for diverse applications, including: small geometry probing; applications using high power optics; design debug; wafer level reliability (WLR) and electro static discharge (ESD).

 

M200FA wafer prober can be configured with GuardMaster™, a guarded environmental chamber, to accommodate low-level and low temperature leakage testing. With controls conveniently located at the front of the system, the M200FA wafer prober offers fine and coarse positioning of the 8-inch x 12-inch XY stage. The Z control of the platen is also situated at the system front, offering variable Z movement as well as fine control for substrate probing.

 

M200FA wafer prober offers easy setup, positioning and adjustment of manipulators. M200FA wafer probers robust, stable probing platform accepts a wide range of accessories in addition to manipulators, including standard and custom chuck plates; manual, motorized or programmable microscope mounts; microscopes from leading optics manufacturers, needle holder assemblies, anti-vibration tables and more.

Maximize Performance

  • Front facing knobs with fine and coarse adjustment
  • Easily configured for different applications
  • Robust, highly stable probing platform
  • Large platen area

M300FA

Manual Analytical wafer Prober for Testing Wafers up to 300mm

 

Failure Analysis / Characterization / Design Verification

Wentworth’s M300FA manual wafer prober enables you to quickly obtain accurate measurements. At the core of M300FA wafer prober is a highly stable, feature-laden platform to capture repeatable, precision measurements. Ultilzing either Wentworth replaceable probes or DC cantilever probe cards the M300FA wafer prober is an ideal platform for a variety of test applications.

 

Ergonomic design and controls make the M300FA wafer prober is extremely user friendly. The M300FA wafer prober precision X / Y stage features lead screws with linear rails to deliver repeatable accuracy over a wide temperature range using our exclusive calibration process.

 

M300FA wafer prober offers easy setup, positioning and adjustment of manipulators. M300FA wafer prober robust, stable probing platform accepts a wide range of accessories in addition to manipulators, including: standard and custom chuck plates; manual, motorized or programmable microscope mounts; microscopes from leading optics manufacturers, anti-vibration tables and more.

Maximize Performance

  • Large area platen height adjustment
  • Fine lift chuck mechanism
  • Robust microscope bridge used with Stereo Zoom and High Powered Microscopes
  • Localized Light Tight, EMC & HV safety enclosure (GuardMaster™)

Aspect L1

Manual Wafer Probe Station for 200mm Wafers

 

General Diagnostic Probing

Aspect L1 wafer prober is a versatile and economical solution for general diagnostic probing, engineering test and failure analysis of microcircuits on wafer substrates up to 200mm (8").

 

Aspect L1 wafer prober is rigidly constructed and compact platform is easily accessible and upgradeable. Fast probe mode is available in addition to either a high power or low power optics package. Aspect L1 wafer prober is designed to accept thermal chucks, and can simultaneously accommodate Wentworth PVX 400 manipulators and a probe card holder for Wentworth Cantilever Probe Cards

 

With its easily maintainable design and range of use, Aspect L1 wafer prober offers users the advantage of an economical manual prober with the ability to significantly enhance its performance.

Maximize Performance

  • Up to 200mm (8") wafer capability
  • Precision manual XY stage and theta rotation
  • Chuck plate vacuum lift
  • Manual fine and coarse platform height adjustment
  • Extensive range of probing accessories and cantilever probe cards
  • Optional: optics; probe card holder; fast probe mode

Leader in ProbeAbility

Wafer Probers & Cantilever Probe Cards

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