PRODUCTION wafer probers

Production Wafer Probe Systems for your application:

customized, enhanced, standard

 

All Wentworth's production wafer probers utilize our Pegasus™ controller architecture which provides a robust and dependable production platform. All stages are controlled by Pegasus™ consisting of the drive electronics, joystick, keypad and optional Windows user interface. Interfacing is made easy with TTL, GPIB (IEEE488.2) and RS232 ports located on the back panel.

 

Pegasus™ S200 & S300 wafer probers are specifically designed and highly recommended for the characterization of wafer sizes from 2” to 12", full or partial wafers. Pegasus™ S200 & S300 wafer probers offers rapid probing, with tunable speeds for specific applications.

 

For high volume, special handling 200mm applications such as GaAs, saw frames, ceramic and silicon, Wentworth APS 80 Automatic wafer probers are an ideal platform. APS 80D wafer probers delivers 200mm double-sided probe capability and offers advanced automation for high volume probing of power devices.

 

Our Prober hardware and software solutions can be customized to your prober / tester requirements and with most configurations, upgrades are available to meet future probing requirements and to insure you have the right return on your investment.

Pegasus™ S200 Series

Probe Stations for 200mm semi-automatic wafer probing

 

Pegasus™ S200: Semiconductors / led / mems

Pegasus™ S200 wafer probers are specifically designed for production probing of a wide range of semiconductors including semiconductors, light-emitting diode (LED) and microelectromechanical systems (MEMS) devices. It is also highly recommended for characterization applications and is designed to handle 2" to 200mm full and partial wafers. Pegasus™ S200 offers rapid probing with tunable speed for specific applications.

 

Probing may be done with either cantilever probe cards or using Pegasus™ Probe integrated wafer edge / height sensor. Pegasus™ Probe is a fully adjustable manual manipulator with built-in height detection, edge sensing, quick needle replacement and adjustable gram force setting. In addition, a variety of standard and custom chuck plates are available for a wide range of applications.

 

Pegasus™ S200D: discretes / mosfets / igbt devices

The Pegasus™ S200D wafer probers, a semi-automatic double-sided prober for up to 200mm wafers, delivers a robust solution for double-sided testing applications involving discrete power semiconductors, metal-oxide-semiconductor field-effect transistor (MOSFET) and insulated-gate bipolar transistor (IGBT) devices. It is also highly recommended for test correlation or engineering design teams working on the above device types to minimize and / or eliminate chuck plate influence from test results.

Pegasus™ s200

  • Fast Probing up to 100mm / sec
  • TTL, Ethernet (10BaseT), RS232 and IEEE 488
  • Easy integration of cameras and other external test equipment components
  • Remote control using Pegasus™ remote commands
  • Active Wafer Profiling using Pegasus™ Probes
  • Semi-automatic two-point wafer alignment to reduce setup time

Pegasus™ S200D

  • Simultaneous, double-sided probing of up to 200mm wafers
  • TTL, Ethernet (10BaseT), RS232 and IEEE 488
  • Unique Calliper arm and probe needle design and Cantilever Probe Cards
  • Adjustable wafer size carriers
  • Tuneable gram force and speed settings

Pegasus™ S300

Probe Station for 300mm semi-automatic wafer testing

 

Design Verification / Failure Analysis / Reliability and More

Pegasus™ S300 wafer probers is an economical semi-automatic prober for testing full and partial wafers to 300mm, and is particularly effective for low volume probing, design verification, failure analysis and for probing packaged components. Pegasus™ S300 wafer probers can be easily be configured with numerous other productivity-boosting accessories.

 

The Pegasus™ S300 wafer probers has a precision stage for fine resolution and repeatable accuracy. Its modular design accommodates a wide range of productivity enhancing and field upgradeable options. Probing is accomplished with either probe cards or micromanipulators. Pegasus™ S300's stage mechanism, microscope mount, and multiple computer-aided probes can all be controlled with the joystick. The Pegasus™ S300 probe system can also be controlled using all industry accepted communications protocols.

Maximize Performance

  • TTL, Ethernet (10BaseT), RS232, IEEE 488 optional
  • Easy integration of cameras and Wentworth LabMaster™ control and monitoring software
  • Remote keyboard for easy control
  • Additional axes available for auxiliary control of probing accessories
  • Motorized platform for setting upper and lower safety limits for probe cards
  • Semi-automatic two-point wafer alignment to reduce setup time
  • Modular design for easly field upgrades

Pegasus A200 Series

Probe Station for 200mm fully automatic wafer probing

 

Pegasus a200: High Volume / Special Handling

Pegasus a200d: High Volume / Double-Side Applications

The Pegasus A200 Series wafer probers deliver menu-driven, push button control via proprietary LabMaster™ control and monitoring software. An extensive range of control and monitoring parameters enable users to operate Pegasus A200 series wafer probers at peak performance, including: real-time monitoring and test setup; premium mapping capability; image analysis; and a host of other advanced features.

 

The Pegasus A200 Series wafer probers dual-end, parallel processing of wafers optimizes wafer handling for maximum throughput. Designed for easy access when manually loading and unloading wafers, Pegasus A200 has a capacity of two cassettes, each containing 25 wafers. Featuring a highly advanced, single-stage wafer detection pre-alignment and transportation system, Pegasus A200 wafer probers ensures long-term accuracy and repeatability.

Pegasus A200

  • Full range of handling capabilities for a variety of materials such as GaAs, saw frames, ceramic
  • Powerful, user-friendly control and monitoring software
  • Pattern recognition system
  • Robot handling system
  • Configurable to high voltages in excess of 5 kV for specialized applications
  • Optional thermal chuck capability

Pegasus A200D

  • Simultaneous, double-sided probing of up to 8" wafers
  • Powerful, user-friendly control and monitoring software
  • Planarization of needle sets and constant preset needle load
  • Pattern recognition system
  • Robot handling system
  • Configurable to high voltages in excess of 5 kV for specialized applications

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Wafer Probers & Cantilever Probe Cards

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